Generation 5+ TFT LCD Etcher

Engenuity Systems' Advanced FPD etch tool is the safest lowest-cost Gen 5.5 production etch tool on the market today. With its compact footprint and in-line design the system ensures the maximum productivity in substrates processed per square meter. Through its simple design , the unique multi-patented system architecture provides the most cost effective, safe FPD substrate etch tool available without sacrificing process capability and reliability.
A patented carrier transports substrates through a muti-step each process without separating the glass from the carrier, thereby eliminating the need for an internal robot. This feature alone increases throughput dramatically since substrate transfer time from chamber to chamber is reduced to a few seconds. In addition by not lifting the glass from the platen under vacuum t risk of ESD is virtually eliminated.
Safety is of utmost importance to Engenuity, as is evident though our system design. Simple design, failsafe mechanisms, strict adherence to industry standards and best practices, and numerous hardware and software interlocks ensure safe operation in.