EngenAsh™ system has been developed for rework applications on organic material in CF, Cell, and TFT fabs

Current EngenAsh™ configuration contains one chamber, which can be interfaced directly with factory robot.  Configuration with multiple parallel process chambers or with load-lock are available too.

EngenAsh ™ Rework system has been used in production.  PS/MVA rework process has been qualified for CF production.

PI Rework demo activities are being engaged with customers for Cell applications

G7/8 hardware has been developed.G7/8 EngenAsh ™ Rework system can be ordered and manufactured with normal lead-time.

Endpoint traces were monitored and used to control the etching time with CO and O peak ratio collected on optical emission spectrum.