Thermal desorption has become a key analytical tool in the development of production worthy thin films utilized in semiconductor manufacturing. Device reliability issues have been better understood and controlled through the integration of such tools to measures gas evolution from the film. Until now these systems have been used almost exclusively during the film development phase only.

The WT-368 brings a proven capability in thermal desorption to the production area through whole wafer handling high reliability cassette to cassette robotic operation and a simple graphical user interface. Building from the successes of its predecessor, the WT-268, this system offers in-production film monitoring for continuing confidence in device reliability during manufacture.

WT288 : System for small sample test

WT388: Semi-automatic system to test full 4,5, 6, 8 inch wafers

WT488: Semi-automatic system to test full 4,5, 6, 8, 12 inch wafers